This article addresses scheduling problems for the hybrid cellular production lines in the semiconductor industry, in which the hybrid cellular production line is defined as the production system composed of both single-functional and multi-functional cellular layouts. Detailed system configuration and material flow of a hybrid cellular production line are presented, and then, the scheduling problems in the hybrid cellular production line are separated into an inter-cell scheduling problem and intra-cell scheduling problems. A multi-agent-based scheduling method is proposed for the inter-cell scheduling problem, and a real-time heuristic scheduling method is proposed for the intra-cell scheduling problem. In the simulation experiments, various scenarios have been compared under the proposed inter-cell and intra-cell scheduling methods with the hybrid cellular production line composed of six cells.