This paper considers the output tracking problem for micro-electro-mechanical systems (MEMS) under uncertainties and external disturbances. The robust non-linear controllers are designed by two methods. The first method consists of a backstepping strategy combined with a first-order sliding mode controller. Also, in order to reduce the chattering effect and to improve the robustness of the proposed scheme, a new variable universe fuzzy control action with an adaptive coefficient is used instead of the signum function in the switching control law. In the proposed fuzzy scheme, the centres of the output membership functions are optimized via three heuristic optimization algorithms including the artificial bee colony (ABC) algorithm, ant colony optimization (ACO) and particle swarm optimization (PSO). In the second method, a class of second-order sliding mode controller is combined with the backstepping strategy. The second controller includes the proposed optimal fuzzy controllers of the first method. The stability of the closed-loop systems in both approaches are proved via the Lyapunov stability criterion and the conditions of stabilization are provided by linear matrix inequalities (LMIs). Numerical simulations are carried out to verify the theoretical results and to demonstrate the robust performance of the proposed controller in output tracking of the time-varying reference signal.