This article presents a systematic approach for assessing the maturity of manufacturing technologies. A methodology is proposed that is based on modelling the capability of the individual processes and technology interfaces between them. It is inspired by a capability maturity model which has been applied successfully in the field of software engineering. The methodology was developed to assess the maturity levels of individual processes and the combined maturity of pairs or chains of processes. To demonstrate its validity, it was applied for assessing the maturity of technologies in the micro and nano manufacturing domain. The results demonstrated its applicability as a tool for evaluating the maturity of micro and nano manufacturing pairs and their constituent processes. Also, it was shown that the methodology can be employed for identifying process pairs, suitable for integration in process chains, together with their potential weaknesses.